Published: 31 December 2010

Piezoelectric actuator for high resolution linear displacement systems

R. Bansevicius1
V. Jurenas2
V. Grigaliunas3
A. Vilkauskas4
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This work presents a piezoelectric actuator which is designed to improve resolution for micrometer screws or motorized actuators such as actuators with stepper motors. Several modifications of piezoelectric actuator were implemented for closed-loop and open-loop applications. For closed-loop applications strain gages are used to obtain a feedback signal. As a result a resolution of displacement measurement up to 18 nm is achieved

About this article

30 September 2010
09 December 2010
31 December 2010
piezoelectric actuator
strain gage feedback
high resolution