Published: 31 December 2010

Piezoelectric actuator for high resolution linear displacement systems

R. Bansevicius1
V. Jurenas2
V. Grigaliunas3
A. Vilkauskas4
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Abstract

This work presents a piezoelectric actuator which is designed to improve resolution for micrometer screws or motorized actuators such as actuators with stepper motors. Several modifications of piezoelectric actuator were implemented for closed-loop and open-loop applications. For closed-loop applications strain gages are used to obtain a feedback signal. As a result a resolution of displacement measurement up to 18 nm is achieved

About this article

Received
30 September 2010
Accepted
09 December 2010
Published
31 December 2010
Keywords
piezoelectric actuator
strain gage feedback
high resolution