The air squeeze film damping effect on the dynamic responses of clamped micro- electromechanical resonators is investigated in this study. A dynamic model for a clamped micro-electromechanical resonator with the damping consideration is derived using Lagrange’s equation. The corresponding resonator eigen solutions are formulated and solved by employing the assumed-mode method. The effect of different parameters; i.e. the resonator size, ambient temperature and pressure on the squeeze film damping characteristics were simulated and investigated. The results indicate that the squeeze film damping effect may significantly affect the dynamic responses of micro-scale electromechanical resonator.
About this article
28 June 2012
04 December 2012
31 December 2012
assumed mode method
Copyright © 2012 Vibroengineering
This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.