Abstract
This work analyses influences of geometry of the micromotor on its performance. Using finite element modeling (FEM) a detailed study of electrostatic force fields between two interacting poles and developed moment of rotation is done. The results received are expanded to the whole motor design where its control and torque characteristics are evaluated. Finally, optimal motor construction conclusions are drawn and new motor is produced by UV lithography
About this article
Received
September 23, 2007
Accepted
October 29, 2007
Published
December 31, 2007
Keywords
MEMS
micromotor
microelectrostatic
electrostatic
modeling
FEM
simulation
Copyright © 2007 Vibroengineering
This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
